The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Jul. 09, 2009
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A positive resist composition including a resin component (A) having a structural unit (a0) represented by general formula (a0-1) (R represents a hydrogen atom, a C-Calkyl group or a C-Chalogenated alkyl group; Rrepresents a Cor more branched alkyl group; and each of Rand Rindependently represents an alkyl group, wherein Rand Rmay be mutually bonded to form a polycyclic group) and/or general formula (a0-2) (R is the same as defined above; Rrepresents a divalent linking group that contains no halogen atom; and Rrepresents an acid dissociable, dissolution inhibiting group), and an acid generator (B1) consisting of a compound represented by general formula (b1) (Yrepresents a C-Cfluorinated alkylene group which may have a substituent; X represents a C-Caliphatic cyclic group which may have a substituent; and Arepresents an organic cation).