The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Jul. 25, 2011
Kurt H. Weiner, San Jose, CA (US);
Tony P. Chiang, Campbell, CA (US);
Aaron Francis, San Jose, CA (US);
John Schmidt, San Jose, CA (US);
Kurt H. Weiner, San Jose, CA (US);
Tony P. Chiang, Campbell, CA (US);
Aaron Francis, San Jose, CA (US);
John Schmidt, San Jose, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.