The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Nov. 27, 2007
Hideki Tateishi, Tokyo, JP;
Tsutomu Nakada, Tokyo, JP;
Akira Susaki, Tokyo, JP;
Shohei Shima, Tokyo, JP;
Yukio Fukunaga, Tokyo, JP;
Hideki Tateishi, Tokyo, JP;
Tsutomu Nakada, Tokyo, JP;
Akira Susaki, Tokyo, JP;
Shohei Shima, Tokyo, JP;
Yukio Fukunaga, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A surface treatment apparatus of a substrate can clean a substrate surface in the air without employing a vacuum apparatus, and can remove a natural oxide film or an organic material, such as BTA, from the substrate surface without resorting to plasma cleaning. The surface treatment apparatus includes: an inert gas supply section for supplying an inert gas to the whole or part of a substrate surface to form an oxygen-blocking zone; a heating section for keeping the substrate surface at a predetermined temperature; and a cleaning gas supply section for supplying a cleaning gas to the oxygen-blocking zone to clean the substrate surface.