The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Aug. 12, 2009
Applicants:
Mitsugu Abe, Atsugi, JP;
Masamitsu Iiyama, Atsugi, JP;
Inventors:
Mitsugu Abe, Atsugi, JP;
Masamitsu Iiyama, Atsugi, JP;
Assignee:
Nomura Micro Science Co., Ltd., Atsugi-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 61/00 (2006.01); B08B 7/04 (2006.01); C02F 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Foreign substances which are not inherently contained in a polishing slurry are selectively separated and removed from a polishing slurry component comprised of abrasives, a solvent and an additive which are inherently contained in the polishing slurry.