The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jul. 29, 2005
Antonius Theodorus Anna Maria Derksen, Eindhoven, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Erik Marie Jose Smeets, Prinsenbeek, NL;
Antonius Theodorus Anna Maria Derksen, Eindhoven, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Erik Marie Jose Smeets, Prinsenbeek, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A distortion measurement apparatus comprising a detector arranged to measure distortion of a substrate, and a processor arranged to receive distortion data indicating the measured distortion of the substrate and to transform the distortion data into a frequency domain representation. The distortion data may alternatively be transformed into an orthogonal polynomial or an orthonormal polynomial representation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile