The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jul. 23, 2009
Frank Scott Johnson, Wappinger Falls, NY (US);
Frank Scott Johnson, Wappinger Falls, NY (US);
GLOBALFOUNDRIES, Inc., Grand Cayman, KY;
Abstract
Methods are provided for fabricating an electronic device having at least one sidewall spacer formed adjacent a selected surface. In one embodiment, the method includes the step of depositing spacer material adjacent first and second raised structures formed on the substrate and extending along substantially perpendicular axes. The method further includes the step of selectively removing spacer material laterally adjacent one of the first raised structure and the second raised structure. During the step of selectively removing, the electronic device is bombarded with ions from a first predetermined direction forming a first predetermined grazing angle with the substrate such that the spacer material adjacent a first sidewall of the first raised structure is substantially exposed to the ion bombardment while the spacer material adjacent opposing sidewalls of the second raised structure is substantially shielded therefrom.