The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2012

Filed:

Jun. 30, 2009
Applicants:

Shiro Igasaki, Kawasaki, JP;

Masaoki Yamagata, Kawasaki, JP;

Inventors:

Shiro Igasaki, Kawasaki, JP;

Masaoki Yamagata, Kawasaki, JP;

Assignee:

Mitutoyo Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.


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