The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jan. 12, 2009
Marcel Henk André Janssens, Delft, NL;
Oscar Franciscus Jozephus Noordman, Eindoven, NL;
Huibert Visser, Zevenhuizen, NL;
Evert Nieuwkoop, Pijnacker, NL;
Marcel Henk André Janssens, Delft, NL;
Oscar Franciscus Jozephus Noordman, Eindoven, NL;
Huibert Visser, Zevenhuizen, NL;
Evert Nieuwkoop, Pijnacker, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Apparatus and methods are used to control a polarization state of a radiation beam. A polarization control unit is configured to modulate a polarization state of at least a part of a radiation beam. A determination arrangement is configured to subsequently determine the polarization state of the at least a part of the radiation beam. A feedback unit is configured to provide signals to the polarization control arrangement based on at least the determined polarization state in order to correct for deviation in the polarization state of the part of the radiation beam from a desired polarization state. For example, the correction may ensure that the polarization state of the part of the radiation beam is at, or returns to, the desired polarization state.