The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jun. 05, 2008
Futoshi Shimai, Kanagawa, JP;
Shigeru Kawata, Kanagawa, JP;
Futoshi Shimai, Kanagawa, JP;
Shigeru Kawata, Kanagawa, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
The object of the present invention is to provide a cooling apparatus which makes it possible to cool a substrate uniformly in a short period of time even if the substrate has a large area. The cooling apparatuscomprises a flat-box-shaped body, a cooling medium supply tubewhich is inserted into the body, a nozzlewhich is attached to the cooling medium supply tubeso as to eject the cooling medium toward the internal surface of the body, a pipefor withdrawing water (refrigerant) ejected from the nozzletoward the body, a chillerfor cooling the water from the pipeto a predetermined temperature, and a circulating pipefor sending the water which has been cooled by the chillerback to the cooling medium supply tube