The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jun. 07, 2006
Ming-chyi Liu, Hsinchu, TW;
Chi-hsin Lo, Hsinchu County, TW;
Ming-Chyi Liu, Hsinchu, TW;
Chi-Hsin Lo, Hsinchu County, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A semiconductor device with an embedded capacitor structure. A dielectric layer is disposed on a substrate, having a contact opening exposing the substrate and a trench opening above the contact opening. A first metal electrode layer is conformally disposed over the sidewalls and bottoms of the contact and trench openings. A second metal electrode layer is conformally disposed over the sidewalls and bottoms of the contact and trench openings. A capacitor dielectric layer is interposed between the first and second metal electrode layers. A method for fabricating the semiconductor device is also disclosed.