The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2012
Filed:
Jul. 22, 2008
Norihiko Saito, Kanagawa, JP;
Sotaro Takeda, Kanagawa, JP;
Norihiko Saito, Kanagawa, JP;
Sotaro Takeda, Kanagawa, JP;
Covalent Materials Corporation, Tokyo, JP;
Abstract
A decompression apparatus has an exhaust mechanism for decompressing a vacuum chamber. The exhaust mechanism has a main exhaust passage one end of which is connected to the vacuum chamber and the other end of which is connected to a vacuum pump, a first valve disposed in the main exhaust passage; a slow exhaust passage one end of which is connected to the vacuum chamber directly or via part of the main exhaust passage and the other end of which is connected to the vacuum pump directly or via part of the main exhaust passage, a cylindrical inorganic porous body disposed in the slow exhaust passage so that a gap is formed between the inorganic porous body and the inner surface of the slow exhaust passage, and a second valve disposed in the slow exhaust passage.