The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2012
Filed:
Feb. 11, 2011
Marian Mankos, Palo Alto, CA (US);
Marian Mankos, Palo Alto, CA (US);
Electron Optica, Palo Alto, CA (US);
Abstract
One embodiment relates to an apparatus for generating a charged particle beam with reduced energy width. A charged particle source is configured to generate a charged particle beam with a range of energies. An energy-dispersive device bends the high-energy component of the charged particle beam at less of an angle in comparison to the bending angle of the low-energy component of the charged particle beam, such that the higher and lower energy charged particle beam components exit the energy-dispersive device at different angles of trajectory. A charged particle mirror reflects the charged particle beam such that charged particles entering at an angle with respect to the normal to the mirror reflection plane exit the mirror symmetrically with respect to the normal and at the same angle. Charged particle lenses converge all energy components exiting the energy-dispersive device at different angles of trajectory at the charged particle mirror reflection plane. A knife-edge plate removes all charged particles with energies higher and lower than a selected energy width. Other embodiments are also disclosed.