The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Mar. 03, 2010
Applicants:
Michael Muehlbeyer, Aalen, DE;
Johannes Lippert, Buch am Wald, DE;
Inventors:
Michael Muehlbeyer, Aalen, DE;
Johannes Lippert, Buch am Wald, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to an apparatus for manipulation of an optical element () in up to six degrees of freedom with respect to a structure () via at least three actuator devices (). The actuator devices () each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points () of the actuator devices () acting directly on the optical element ().