The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Aug. 11, 2010
David William Sesko, Woodinville, WA (US);
Joseph Daniel Tobiason, Woodinville, WA (US);
David William Sesko, Woodinville, WA (US);
Joseph Daniel Tobiason, Woodinville, WA (US);
Mitutoyo Corporation, Kawasaki-shi, JP;
Abstract
A fixed wavelength absolute distance interferometer including a first interferometer comprising a first light source transmitting a first light beam having a wavelength W toward a measurement target, a wavefront radius detector configured to provide a first measurement responsive to the wavefront radius at the wavefront radius detector, and a first path length calculating portion calculating a coarse resolution absolute path length measurement R; and a second interferometer comprising a beam transmitting device transmitting a second-interferometer light beam having a wavelength Λ, a beam splitting/combining device separating the second-interferometer light beam into reference and measurement beams and combining the returning reference and measurement beams into a combined beam, a second-interferometer detector configured to receive the combined beam and provide signals of a phase φ of the combined beam, and a second path length calculating portion configured to determine a medium resolution absolute path length measurement Z.