The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Aug. 20, 2009
Gregory L. Kirk, Pleasanton, CA (US);
Matthew W. Derstine, Los Gatos, CA (US);
Shiow-hwei Hwang, San Ramon, CA (US);
Isabella T. Lewis, San Jose, CA (US);
Gregory L. Kirk, Pleasanton, CA (US);
Matthew W. Derstine, Los Gatos, CA (US);
Shiow-Hwei Hwang, San Ramon, CA (US);
Isabella T. Lewis, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An inspection system for creating images of a substrate. A light source directs an incident light onto the substrate, and a light source timing control controls a pulse timing of the incident light. A stage holds the substrate and moves the substrate under the incident light, so that the substrate reflects the incident light as a reflected light. A stage position sensor reports a position of the stage, and a stage position control controls the position of the stage. A time domain integration sensor receives the reflected light, and a time domain integration sensor timing control controls a line shift of the time domain integration sensor. A control system is in communication with the light source timing control, the stage position control, and the time delay integration sensor timing control, and sets the pulse timing of the incident light, the position of the stage, and the line shift of the time delay integration sensor, such that a single line of the time domain integration sensor integrates reflected light from more than one pulse of the incident light from the light source.