The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Sep. 01, 2009
Applicant:
Volker Drexel, Koenigsbronn, DE;
Inventor:
Volker Drexel, Koenigsbronn, DE;
Assignee:
Carl Zeiss NTS GmbH, Oberkochen, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Dwhich is larger than a diameter Dof the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·D≦D≦3·D. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.