The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2012
Filed:
Aug. 06, 2009
Yushi Sato, Ise, JP;
Toshio Miki, Ise, JP;
Yosuke Muraguchi, Ise, JP;
Katsumi Yasuda, Ise, JP;
Kazunari Kitaji, Ise, JP;
Yasushi Muragishi, Ise, JP;
Minoru Maeda, Ise, JP;
Yushi Sato, Ise, JP;
Toshio Miki, Ise, JP;
Yosuke Muraguchi, Ise, JP;
Katsumi Yasuda, Ise, JP;
Kazunari Kitaji, Ise, JP;
Yasushi Muragishi, Ise, JP;
Minoru Maeda, Ise, JP;
Sinfonia Technology Co., Ltd., Tokyo, JP;
Abstract
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.