Lateral drain-extended mosfet having channel along sidewall of drain extension dielectric

Abstract

An integrated circuit () includes one of more transistors () on or in a substrate () having semiconductor surface layer, the surface layer having a top surface. At least one of the transistors are drain extended metal-oxide-semiconductor (DEMOS) transistor (). The DEMOS transistor includes a drift region () in the surface layer having a first dopant type, a field dielectric () in or on a portion of the surface layer, and a body region of a second dopant type () within the drift region (). The body region () has a body wall extending from the top surface of the surface layer downwards along at least a portion of a dielectric wall of an adjacent field dielectric region. A gate dielectric () is on at least a portion of the body wall. An electrically conductive gate electrode () is on the gate dielectric () on the body wall. A source region () of the first doping type is in the body region (), a drain region () of the first doping type is in the drift region (), and interconnects () are operable to electrically connect the one or more transistors to each other on the integrated circuit ().