The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2012

Filed:

Feb. 04, 2009
Applicants:

Hiroyasu Kawashima, Tokyo, JP;

Shinichi Sekiguchi, Tokyo, JP;

Inventors:

Hiroyasu Kawashima, Tokyo, JP;

Shinichi Sekiguchi, Tokyo, JP;

Assignee:

Ebara Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F01D 13/00 (2006.01); F03B 15/00 (2006.01); F04D 1/10 (2006.01); F04D 17/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

A turbo vacuum pump comprising a suction partA that sucks gas in an axial direction; a discharge partthat discharges the gas sucked by the suction partA, the discharge parthaving a plurality of rotating impellersand a stationary impellerarranged so as to be opposed to each of the plurality of rotating impellers; and a rotating shaftthat rotates the plurality of rotating impellers, wherein the plurality of rotating impellersinclude at least one stage of a first turbine impellerfor discharging the sucked gas in the axial direction, the first turbine impellerbeing fixed to a suction-part-side end faceof the rotating shaft, and at least one stage of a second turbine impellerfixed to the rotating shaftthat extends through the second turbine impeller, the second turbine impellerbeing arranged downstream of the first turbine impeller


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