The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Apr. 28, 2008
Takumi Namekawa, Chigasaki, JP;
Kei Baba, Chigasaki, JP;
Yuya Inoue, Chigasaki, JP;
Masao Murata, Chigasaki, JP;
Koji Hane, Chigasaki, JP;
Robert D. Taff, Pleasanton, CA (US);
Robert R. Mckay, Pleasanton, CA (US);
Ralph D. Fox, Pleasanton, CA (US);
Takumi Namekawa, Chigasaki, JP;
Kei Baba, Chigasaki, JP;
Yuya Inoue, Chigasaki, JP;
Masao Murata, Chigasaki, JP;
Koji Hane, Chigasaki, JP;
Robert D. Taff, Pleasanton, CA (US);
Robert R. McKay, Pleasanton, CA (US);
Ralph D. Fox, Pleasanton, CA (US);
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
The present invention provides applicators reducing generating bubble. Dispersion liquid is supplied while the pressure of a circulation tank on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks. The dispersion liquid in the discharge chambers is recovered while the pressure in a circulation tank serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.