The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Jan. 21, 2009
Martin Schriever, Aalen, DE;
Ulrich Wegmann, Koenigsbronn, DE;
Stefan Hembacher, Bobingen, DE;
Bernhard Geuppert, Aalen, DE;
Juergen Huber, Heidenheim, DE;
Norbert Kerwien, Moegglingen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Markus Hauf, Ulm, DE;
Martin Schriever, Aalen, DE;
Ulrich Wegmann, Koenigsbronn, DE;
Stefan Hembacher, Bobingen, DE;
Bernhard Geuppert, Aalen, DE;
Juergen Huber, Heidenheim, DE;
Norbert Kerwien, Moegglingen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Markus Hauf, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The disclosure relates to an optical apparatus including a light source that emits light in the form of light pulses having a pulse frequency, and including at least one optical element. The disclosure also relates to a projection exposure machine including a pulsed light source and a projection objective, and to a method for modifying the imaging behavior of such an apparatus, such as in a projection exposure machine.