The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Apr. 20, 2007
Takahiro Oikawa, Gunma, JP;
Takahiro Oikawa, Gunma, JP;
SANYO Semiconductor Co., Ltd., Gunma, JP;
Semiconductor Components Industries, LLC, Phoenix, AZ (US);
Abstract
The invention is directed to a semiconductor device having a via hole and a method of manufacturing the same that achieve both the prevention of a barrier layer insufficiently covering the via hole and the control of via resistance at the same time. A semiconductor substrate having a pad electrode on its front surface is prepared. The semiconductor substrate is etched from its back surface to its front surface to form a via hole exposing the pad electrode. A first barrier layer is then formed in the via hole by a sputtering method or a PVD method and reverse-sputtering (etching). By this reverse-sputtering, the barrier layer on the bottom of the via hole is removed to expose the pad electrode. A second barrier layer is then formed on the pad electrode exposed in the via hole. The via resistance is controlled by adjusting only the thickness of the second barrier layer.