The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
May. 21, 2010
Yuichi Tanaka, Koshi, JP;
Yuichi Tanaka, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A substrate processing systemcomprises a first detecting partconfigured to detect unprocessed wafers W, and a second detecting partconfigured to detect processed wafers W. The first detecting partis configured to detect whether the unprocessed wafers W are respectively accommodated in respective accommodating portionsof a containeror not, and to detect accommodated conditions of the respective unprocessed wafers W accommodated in the respective accommodating portions. The second detecting partis configured to collectively detect whether the processed wafers W are respectively accommodated in the respective accommodating portionsof the container
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