The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Aug. 24, 2008
Yi-nan Su, Tao-Yuan, TW;
Chun-ming Chang, Kaohsiung County, TW;
Yi-Nan Su, Tao-Yuan, TW;
Chun-Ming Chang, Kaohsiung County, TW;
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Abstract
A structure of trench capacitor and method for manufacturing the trench capacitor is provided. The collar oxide layer of the trench capacitor is formed by a thermal oxidation process. Moreover, a protective layer such as silicon nitride covers the collar oxide layer. A failure analysis of the collar oxide layer can be operated by detecting the protective layer. If the protective layer is detected, the collar oxide layer is therefore at a suitable thickness. Furthermore, a mask layer rather than the collar oxide layer is used as a mask during the trench formation.