The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2012

Filed:

Nov. 11, 2011
Applicants:

Shunji Yoshida, Osaka, JP;

Ryou Kato, Osaka, JP;

Toshiya Yokogawa, Nara, JP;

Inventors:

Shunji Yoshida, Osaka, JP;

Ryou Kato, Osaka, JP;

Toshiya Yokogawa, Nara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/205 (2006.01); H01L 21/66 (2006.01); C30B 25/00 (2006.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
Abstract

InGaN (0<y<1) layers whose principal surface is a non-polar plane or a semi-polar plane are formed by an MOCVD under different growth conditions. Then, the relationship between the growth temperature and the In supply mole fraction in a case where the pressure and the growth rate are constant is determined based on a growth condition employed for formation of InGaN (0<x<1) layers whose emission wavelengths are equal among the InGaN layers. Then, a saturation point is determined on a curve representing the relationship between the growth temperature and the In supply mole fraction, the saturation point being between a region where the growth temperature monotonically increases according to an increase of the In supply mole fraction and a region where the growth temperature saturates. Under a growth condition corresponding to this saturation point, an InGaN layer is grown.


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