The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2012

Filed:

Apr. 09, 2009
Applicants:

Christopher K. Ober, Ithaca, NY (US);

Yi Yi, Urbana, IL (US);

Inventors:

Christopher K. Ober, Ithaca, NY (US);

Yi Yi, Urbana, IL (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01); C07H 15/04 (2006.01); C07D 309/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention provides various photoacid generator compounds and ionic components thereof. Photoresist compositions that include the ions and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for use in, for example, various microfabrication applications.


Find Patent Forward Citations

Ober, Christopher. (2012). Photoacid generator compounds and compositions (U.S. Patent No. 8163461). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8163461

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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