The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Jul. 14, 2008
Katsutoshi Takagi, Hyogo, JP;
Yuki Iwasaki, Hyogo, JP;
Masaya Ehira, Hyogo, JP;
Akira Nanbu, Hyogo, JP;
Mototaka Ochi, Hyogo, JP;
Hiroshi Goto, Hyogo, JP;
Nobuyuki Kawakami, Hyogo, JP;
Katsutoshi Takagi, Hyogo, JP;
Yuki Iwasaki, Hyogo, JP;
Masaya Ehira, Hyogo, JP;
Akira Nanbu, Hyogo, JP;
Mototaka Ochi, Hyogo, JP;
Hiroshi Goto, Hyogo, JP;
Nobuyuki Kawakami, Hyogo, JP;
Kobe Steel, Ltd., Kobe-shi, JP;
Kobelco Research Institute, Inc., Kobe-shi, JP;
Abstract
The present invention relates to an Al—Ni—La—Si system Al-based alloy sputtering target including Ni, La and Si, in which, when a section from (¼)t to (¾)t (t: thickness) in a cross section vertical to a plane of the sputtering target is observed with a scanning electron microscope at a magnification of 2000 times, (1) a total area of an Al—Ni system intermetallic compound having an average particle diameter of 0.3 μm to 3 μm with respect to a total area of the entire Al—Ni system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni system intermetallic compound being mainly composed of Al and Ni; and (2) a total area of an Al—Ni—La—Si system intermetallic compound having an average particle diameter of 0.2 μm to 2 μm with respect to a total area of the entire Al—Ni—La—Si system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni—La—Si system intermetallic compound being mainly composed of Al, Ni, La, and Si.