The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2012

Filed:

Aug. 29, 2007
Applicants:

Stephan G. Mueller, Troy, NY (US);

Hudson M. Hobgood, Pittsboro, NC (US);

Valeri F. Tsvetkov, Gasburg, VA (US);

Inventors:

Stephan G. Mueller, Troy, NY (US);

Hudson M. Hobgood, Pittsboro, NC (US);

Valeri F. Tsvetkov, Gasburg, VA (US);

Assignee:

Cree, Inc., Durham, NC (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 21/02 (2006.01); C30B 21/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

A physical vapor transport growth technique for silicon carbide is disclosed. The method includes the steps of introducing a silicon carbide powder and a silicon carbide seed crystal into a physical vapor transport growth system, separately introducing a heated silicon-halogen gas composition into the system in an amount that is less than the stoichiometric amount of the silicon carbide source powder so that the silicon carbide source powder remains the stoichiometric dominant source for crystal growth, and heating the source powder, the gas composition, and the seed crystal in a manner that encourages physical vapor transport of both the powder species and the introduced silicon-halogen species to the seed crystal to promote bulk growth on the seed crystal.


Find Patent Forward Citations

Loading…