The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2012
Filed:
Aug. 11, 2009
Noboru Chikusa, Yokkaichi, JP;
Masaki Itoh, Yokkaichi, JP;
Noboru Chikusa, Yokkaichi, JP;
Masaki Itoh, Yokkaichi, JP;
Mitsubishi Materials Corporation, Tokyo, JP;
Abstract
The problem to be solved is to provide an analysis apparatus and analysis method of chlorosilanes capable of stably carrying out an analysis with less contamination. An analysis apparatus of chlorosilanes includes a vaporizerfor vaporizing chlorosilanes L and an analyzer for analyzing materials rand rremained by vaporizing. In the analysis apparatus, the vaporizerincludes a hotplate, a coverdetachably attached onto the hotplateand configuring a heating chamberwith the hotplate, and a sample vesselarranged in the heating chamberand having an opening upside capable of storing the chlorosilanes L. The coverincludes a supply portfor supplying an inert gas or nitrogen gas into the heating chamberand a discharge portfor discharging gases in the heating chamber
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile