The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Jan. 28, 2011
Christopher Wargo, Wellesley, MA (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-hwa Shyu, Andover, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
William Basser, North Adams, MA (US);
Christopher Wargo, Wellesley, MA (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-Hwa Shyu, Andover, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
William Basser, North Adams, MA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.