The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Jun. 23, 2009
Applicants:
Kanak B. Agarwal, Austin, TX (US);
Jerry D. Hayes, Georgetown, TX (US);
Inventors:
Kanak B. Agarwal, Austin, TX (US);
Jerry D. Hayes, Georgetown, TX (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A configurable PSRO measurement circuit is used to measure the frequency dependent capacitance of a target through silicon via (TSV) or other conductive structure. Measurements of the target structure are aided by using adjustable resistors and a de-embedding structure to measure the effects of parasitic capacitance, C. Current is measured to both the device under test (DUT) and the de-embedding structure. From these measurements, the frequency dependent capacitance of the DUT is calculated.