The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
May. 12, 2009
Tomohiro Takamatsu, Kawasaki, JP;
Junichi Watanabe, Kawasaki, JP;
Ko Nakamura, Kawasaki, JP;
Wensheng Wang, Kawasaki, JP;
Naoyuki Sato, Yokahama, JP;
Aki Dote, Kawasaki, JP;
Kenji Nomura, Kawasaki, JP;
Yoshimasa Horii, Kawasaki, JP;
Masaki Kurasawa, Kawasaki, JP;
Kazuaki Takai, Kawasaki, JP;
Tomohiro Takamatsu, Kawasaki, JP;
Junichi Watanabe, Kawasaki, JP;
Ko Nakamura, Kawasaki, JP;
Wensheng Wang, Kawasaki, JP;
Naoyuki Sato, Yokahama, JP;
Aki Dote, Kawasaki, JP;
Kenji Nomura, Kawasaki, JP;
Yoshimasa Horii, Kawasaki, JP;
Masaki Kurasawa, Kawasaki, JP;
Kazuaki Takai, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
There are provided a capacitor lower electrode formed on an adhesive layer, whose surface roughness is 0.79 nm or less, and having a (111) orientation that is inclined from a perpendicular direction to an upper surface of a substrate by 2.3° or less, a ferroelectric layer having a structure the (111) orientation of which is inclined from the perpendicular direction to the upper surface of the substrate by 3.5° or less, and a capacitor upper electrode.