The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Jan. 13, 2009
Applicants:
Akira Shimizu, Sagamihara, JP;
Akiko Kobayashi, Tokyo, JP;
Hiroki Kanayama, Nagaoka, JP;
Inventors:
Assignee:
ASM Japan K.K., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17D 1/17 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to a precursor reservoir; outputting the mixture of the vaporized precursor and the carrier gas from the precursor reservoir; and supplying the mixture to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice.