The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Mar. 22, 2011
Sachio Uto, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunzi Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Sachio Uto, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunzi Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source, illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled, controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light, detecting the light reflected from the specimen, processing the detected light so as to detect defects, and outputting information about the defects. The ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside.