The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Oct. 09, 2008
Jozef Augustinus Maria Alberti, Nederweert, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Frans Erik Groensmit, Helmond, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Abraham Alexander Soethoudt, Eindhoven, NL;
Jozef Augustinus Maria Alberti, Nederweert, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Frans Erik Groensmit, Helmond, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Abraham Alexander Soethoudt, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method is provided for placing a substrate onto a surface of a substrate holder, the surface having a plurality of burls. First substrate placement data is calculated. This data enables placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder. Then, the substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.