The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Oct. 19, 2006
Applicants:
Yutaka Inouchi, Kyoto, JP;
Syojiro Dohi, Kyoto, JP;
Yasunori Ando, Kyoto, JP;
Yasuhiro Matsuda, Kyoto, JP;
Inventors:
Yutaka Inouchi, Kyoto, JP;
Syojiro Dohi, Kyoto, JP;
Yasunori Ando, Kyoto, JP;
Yasuhiro Matsuda, Kyoto, JP;
Assignee:
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
When an ion beamis to be extracted from an ion sourceby using a gas containing boron trifluoride as an ion source gasfor supplying the gas into a plasma chamberfor the ion source, a bias voltage Vof a plasma electrodewith respect to the plasma chamberfor the ion sourceis set to be positive by a bias circuit