The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Feb. 14, 2008
Applicants:
Ok-sun Lee, Gyeonggi-do, KR;
Hyung-seok Choi, Gyeonggi-do, KR;
Yo-han Ahn, Gyeonggi-do, KR;
Ji-young Kim, Gyeonggi-do, KR;
Inventors:
Ok-Sun Lee, Gyeonggi-do, KR;
Hyung-Seok Choi, Gyeonggi-do, KR;
Yo-Han Ahn, Gyeonggi-do, KR;
Ji-Young Kim, Gyeonggi-do, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A contamination analysis unit and method for inspecting pollutants remaining on a target side of an inspection object such as a reticle after cleaning the object is provided. After steeping the target side in a solution, a sampling liquid may be abstracted therefrom after a predetermined time and may be analyzed.