The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Sep. 05, 2007
Sander Frederik Wuister, Eindhoven, NL;
Johan Frederik Dijksman, Weert, NL;
Yvonne Wendela Kruijt-stegeman, Eindhoven, NL;
Ivar Schram, Weert, NL;
Jeroen Herman Lammers, Eindhoven, NL;
Richard Joseph Marinus Schroeders, Eindhoven, NL;
Sander Frederik Wuister, Eindhoven, NL;
Johan Frederik Dijksman, Weert, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Ivar Schram, Weert, NL;
Jeroen Herman Lammers, Eindhoven, NL;
Richard Joseph Marinus Schroeders, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A chuck apparatus for holding a substrate is the disclosed. The chuck apparatus includes a first surface portion on which the substrate is to be held and a second surface portion adjacent to the first surface portion and extending at least partially around an edge of the first surface portion and which, in use, is arranged to deflect gas over the first surface portion and thus the substrate that is to be held on the first surface portion.