The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Jul. 10, 2009
Jozef Thomas Beek, Rosmalem, NL;
Johannes Van Wingerden, Hardinxveld-Giessendam, NL;
Wim Van Den Einden, Deukne, NL;
Kim Phan Le, Eindheven, NL;
Gerhard Koops, Aalst, BE;
Cas Van Der Avoort, Waalre, NL;
Jozef Thomas Beek, Rosmalem, NL;
Johannes van Wingerden, Hardinxveld-Giessendam, NL;
Wim van den Einden, Deukne, NL;
Kim Phan Le, Eindheven, NL;
Gerhard Koops, Aalst, BE;
Cas van der Avoort, Waalre, NL;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A MEMS resonator, comprising a planar resonator body formed of two different materials with opposite sign temperature coefficient of Young's modulus. A first portion of one material extends across the full thickness of the resonator body. This provides a design which allows reduced temperature drift.