The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2012

Filed:

Apr. 30, 2010
Applicants:

Hans-guenter Zimmer, Reute, DE;

Joerg Krause, Freiburg, DE;

Inventors:

Hans-Guenter Zimmer, Reute, DE;

Joerg Krause, Freiburg, DE;

Assignee:

Micronas GmbH, Freiburg I. BR., DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for producing a defect card for individual dies located on a wafer, comprising: producing first and second defect cards, where the defective individual dies whose adjoining individual dies form an environment having a defect density up to a first value (δ) are classified as defective on the first defect card, and where the defective individual dies which are not considered upon the production of the first defect card are classified as defective on the second defect card; producing a third defect card by classifying additional individual dies on the second defect card as defective, where adjoining individual dies of the additional defective individual dies form an environment having at least one defect density of a second value (δ), which second value is less than the first value (δ); and producing a fourth defect card by unifying the third defect card with the first defect card.


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