The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2012

Filed:

Mar. 26, 2009
Applicants:

Andrew Millward, Longmont, CO (US);

Joseph V. Vininski, Boulder, CO (US);

Robert Torres, Jr., Parker, CO (US);

Tadaharu Wantanbe, Superior, CO (US);

Carrie L. Wyse, Longmont, CO (US);

Mark Raynor, Longmont, CO (US);

Dan Davia, Longmont, CO (US);

Praveen Jha, Longmont, CO (US);

Inventors:

Andrew Millward, Longmont, CO (US);

Joseph V. Vininski, Boulder, CO (US);

Robert Torres, Jr., Parker, CO (US);

Tadaharu Wantanbe, Superior, CO (US);

Carrie L. Wyse, Longmont, CO (US);

Mark Raynor, Longmont, CO (US);

Dan Davia, Longmont, CO (US);

Praveen Jha, Longmont, CO (US);

Assignee:

Matheson Tri-Gas, Inc., Basking Ridge, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 53/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of reducing moisture in a fluorine-containing gas is described. The method may include the steps of providing a purifier material that includes elemental carbon, and flowing the unpurified fluorine-containing gas having an unpurified moisture concentration over or through the carbon-based purifier material. At least a portion of the moisture is captured in the purifier material so that a purified fluorine-containing gas that emerges downstream of the purifier material has a reduced moisture concentration that is about 50% or less of the unpurified moisture concentration.


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