The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Oct. 08, 2009
Tatsuya Ogi, Nirasaki, JP;
Tatsuya Ogi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate transfer method for use in a substrate processing apparatus including a first processing unit that performs a first process on a substrate, a second processing unit performing a second process on the substrate, and a substrate transfer mechanism that transfers the substrate between the first and the second processing unit, includes: detecting misalignment of the substrate when the substrate is unloaded from the first processing unit; and correcting the misalignment of the substrate based on a detected result. Further, the substrate transfer method includes loading the misalignment-corrected substrate to a targeted position in the second processing unit.