The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Apr. 14, 2008
Toyoaki Nakajima, Chigasaki, JP;
Yujirou Kurokawa, Chigasaki, JP;
Tsutomu Yuri, Chigasaki, JP;
Ryota Tanaka, Chigasaki, JP;
Shuji Yoshida, Chigasaki, JP;
Toyoaki Nakajima, Chigasaki, JP;
Yujirou Kurokawa, Chigasaki, JP;
Tsutomu Yuri, Chigasaki, JP;
Ryota Tanaka, Chigasaki, JP;
Shuji Yoshida, Chigasaki, JP;
Ulvac, Inc., Chigasaki-Shi, JP;
Abstract
A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.