The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Feb. 26, 2007
Joaquin Torres, St. Martin le Vinoux, FR;
Vincent Arnal, Grenoble, FR;
Laurent-georges Gosset, Crolles, FR;
Wim Besling, Saint-Nazaire-les-Eymes, FR;
Joaquin Torres, St. Martin le Vinoux, FR;
Vincent Arnal, Grenoble, FR;
Laurent-Georges Gosset, Crolles, FR;
Wim Besling, Saint-Nazaire-les-Eymes, FR;
STMicroelectronics (Crolles 2) SAS, Crolles Cedex, FR;
Koninkljike Philips Electronics N.V., Ba Eindhoven, NL;
Abstract
A semiconductor device includes an interconnect having electrically conductive portions and a dielectric layer made of a first dielectric material. A trench is formed in the dielectric layer. The exposed portions of the dielectric layer which form the side walls of the trench are removed. A dielectric liner is then deposited on the side walls of the trench, the liner being made of a second dielectric material.