The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Dec. 28, 2007
Applicants:
Dong-mok Shin, Daejeon, KR;
Eun-mi Choi, Daejeon, KR;
Seung-beom Cho, Daejeon, KR;
Hyun-chul Ha, Daejeon, KR;
Inventors:
Dong-Mok Shin, Daejeon, KR;
Eun-Mi Choi, Daejeon, KR;
Seung-Beom Cho, Daejeon, KR;
Hyun-Chul Ha, Daejeon, KR;
Assignee:
LG Chem, Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is CMP slurry, which includes a pyridine-based compound including at least two pyridinyl groups, and minimizes the occurrence of dishing and erosion of a wiring line.