The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2012

Filed:

Jun. 25, 2009
Applicants:

Teruyuki Hotta, Osaka, JP;

Takahiro Ishizaki, Osaka, JP;

Tomohiro Kawase, Osaka, JP;

Masaharu Takeuchi, Osaka, JP;

Inventors:

Teruyuki Hotta, Osaka, JP;

Takahiro Ishizaki, Osaka, JP;

Tomohiro Kawase, Osaka, JP;

Masaharu Takeuchi, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/31 (2006.01); C23C 18/34 (2006.01); C23C 18/40 (2006.01); B05D 5/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed is an electroless plating solution exhibiting a good plating metal filling performance even for larger trenches or vias of several to one hundred and tens of μm, in a manner free from voids or seams, and allowing maintenance of stabilized performance for prolonged time. The electroless plating solution contains at least a water-soluble metal salt, a reducing agent for reducing metal ions derived from the water-soluble metal salt, and a chelating agent. In addition, the electroless plating solution contains a sulfur-based organic compound as a leveler having at least one aliphatic cyclic group or aromatic cyclic group to which may be linked at least one optional substituent. The aliphatic cyclic group or the aromatic cyclic group contains optional numbers of carbon atoms, oxygen atoms, phosphorus atoms, sulfur atoms and nitrogen atoms.


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