The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Oct. 14, 2005
Atsushi Yumoto, Tokyo, JP;
Naotake Niwa, Tokyo, JP;
Fujio Hiroki, Tokyo, JP;
Ichiro Shiota, Tokyo, JP;
Takahisa Yamamoto, Chiba, JP;
Atsushi Yumoto, Tokyo, JP;
Naotake Niwa, Tokyo, JP;
Fujio Hiroki, Tokyo, JP;
Ichiro Shiota, Tokyo, JP;
Takahisa Yamamoto, Chiba, JP;
Tama-Tlo, Ltd., Tokyo, JP;
Abstract
A physical vapor deposition system for making microparticles generated by using a non-transfer type plasma torch not generating an outgas even in an ultra-high vacuum environment accelerate by a supersonic gas flow and depositing microparticles on a substrate to form a coating film is provided. Provision is made of an evaporation chamber () having a plasma torch () and an evaporation source () inside it and a film formation chamberhaving a supersonic nozzleand a substrate for film formation. Each plasma torch has a substantially cylindrical electrically conductive anode, a polymer-based or non-polymer-based insulation pipeinserted to the inner side of that and generating less outgas than a phenol resin, and a rod shaped cathodeinserted to the inner side of an insulation pipe. Microparticles are generated from an evaporation source () by a plasma obtained by applying voltages to the anodeand the cathode, ejected from a supersonic nozzle, made to ride on a supersonic gas flow, and deposited by physical vapor deposition onto a substrate for film formation