The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Feb. 15, 2007
Shinichi Okita, Tokyo, JP;
Shinichi Okita, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
When a host issues an analysis order that specifically instructs the analytical contents to an analytical apparatus (step), the analytical apparatus collects two types of measurement and/or inspection results from a measurement and/or inspection instrument (stepsto), and in step, the analytical apparatus analyzes the measurement and/or inspection results and optimizes processing conditions of a series of processes related to wafer W. In step, data related to a processing state of a processing apparatus is acquired from the processing apparatus as needed. In step, the measurement and/or inspection results and the optimization results are accumulated in a database, and the optimization results are transmitted to various processing apparatuses (including the measurement and/or inspection instrument). After that, the analytical apparatus sends a processing end notice to the host (step).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile