The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8134257 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 13, 2012

Filed:

Sep. 22, 2008
Applicants:

Petrus Mathijs Henricus Vosters, Bladel, NL;

Martinus Arnoldus Henricus Terken, Lierop, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K 41/02 (2006.01); G03B 27/58 (2006.01);
U.S. Cl.
CPC ...
Abstract

An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.


Find Patent Forward Citations

Vosters, Petrus Mathijs Henricus. (2012). Lithographic apparatus having a lorentz actuator with a composite carrier (U.S. Patent No. 8134257). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8134257

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