The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Jul. 06, 2007
Kosuke Kuwabara, Ibaraki, JP;
Takashi Ando, Ibaraki, JP;
Masahiko Ogino, Ibaraki, JP;
Hiroshi Yoshida, Ibaraki, JP;
Yasuhiko Tada, Ibaraki, JP;
Kosuke Kuwabara, Ibaraki, JP;
Takashi Ando, Ibaraki, JP;
Masahiko Ogino, Ibaraki, JP;
Hiroshi Yoshida, Ibaraki, JP;
Yasuhiko Tada, Ibaraki, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus transferring a surface structure of a stamper to material to be patterned by allowing the stamper come in contact with the material to be patterned. The imprint apparatus includes a holding means that holds the material to be patterned and the stamper with a distance therebetween, a pressure reduction means that reduces pressure of a chamber in which the material to be patterned and the stamper are placed, and an alignment means that aligns the stamper with the material to be patterned.